Presentation Information
[10p-PA2-28]SiO barrier films optical properties change over time
〇Koichi Muro1, Takashi Inomata2 (1.Teikyo Univ., 2.Kisan Kinzoku Chemicals co., ltd.)
Keywords:
Silicon monoxide,Barrier film,Vapor deposition
The market for SiO (silicon monoxide) barrier films is expanding (in electronic components, food, medical, cosmetic, and industrial applications). SiO barrier films require low permeability to water vapor and oxygen as transparent materials. We have previously published findings on the water vapor barrier properties, film structure contributing to stress, optical properties, and applications (multilayer filter applications) of SiO vapor-deposited films. This report details our investigation into the temporal changes in the optical properties of SiO films.