Presentation Information
[10p-PA2-32]Optical Properties of RF Magnetron Sputtered Ti/Ag Multilayer Films
〇(M1)Hideyuki Kondo1, Midori Kawamura1, Takayuki Kiba1 (1.Kitami Inst.)
Keywords:
silver,titanium,reflectance
Ag films are promising candidates for telescope mirrors due to their high reflectivity from visible to infrared wavelengths. However, since the reflectivity decreases caused by sulfidation and other factors, it has been reported that depositing a metal oxide protective layer using the ALD method also leads to a reduction in reflectivity. Therefore, in this study, we fabricated Ti/Ag multilayer films with an ultra-thin Ti native oxide layer of 3 nm or less in thickness, and investigated the optimal film structure to utilize it as a protective layer during ALD deposition.