Presentation Information
[10p-PA2-33]Fabrication and Optical Characterization of Al Nanolayer-deposited Ag Films Prepared by Vacuum Evaporation
〇(M1)So Onishi1, Midori Kawamura1, Takayuki Kiba1 (1.Kitami Inst. Tech.)
Keywords:
Silver,multilayer,Optical properties
Silver (Ag) films exhibit high reflectance in the visible and infrared regions and are therefore promising candidates for telescope mirror applications. However, their poor durability remains a significant challenge. Although the introduction of AlOx protective layers by atomic layer deposition (ALD) has been investigated, a decrease in reflectance due to oxidation of the Ag surface by ALD precursors has been reported. In this study, Al/Ag multilayer films were fabricated by vacuum evaporation as a fundamental investigation toward the introduction of AlOx protective layers. The optical properties of the fabricated films were evaluated, and their layer structures were identified using the finite-difference time-domain (FDTD) method.