Presentation Information

[10p-PA2-34]Relationship between Growth Conditions and Crystallinity of Pt Thin Films by Mist CVD

〇Shiori Ishikawa1, Isao Takahashi2, Haruka Sawamizu2, Koki Morimoto1 (1.Qualtec Co., Ltd., 2.Ritsumeikan Univ.)

Keywords:

Pt thin films,Crystallinity,Mist Chemical Vapor Deposition