Presentation Information
[10p-PA2-34]Relationship between Growth Conditions and Crystallinity of Pt Thin Films by Mist CVD
〇Shiori Ishikawa1, Isao Takahashi2, Haruka Sawamizu2, Koki Morimoto1 (1.Qualtec Co., Ltd., 2.Ritsumeikan Univ.)
Keywords:
Pt thin films,Crystallinity,Mist Chemical Vapor Deposition
