Presentation Information
[10p-PA2-38]Fundamental Study of a Self-Roll- Up Process for Microcoil Fabrication
〇Yuki Tabuchi1, Oka Chiemi1, Sakurai Junpei1, Hata Seiichi1 (1.Nagoya Univ.)
Keywords:
MEMS,Thin film,Metallic glass
In recent years, self-roll-up structures that utilize residual stress in thin films have attracted attention in the MEMS field as a simple method for fabricating three-dimensional microstructures. In this study, I focused on thin-film metallic glass (Ni57Nb17Zr26) and investigated self-roll-up structures induced by stress changes during heat treatment. Specifically, I examined stress relaxation above the glass transition temperature of TFMG and stress generation caused by thermal expansion mismatch during cooling. The effects of film thickness and heat treatment time on the radius of curvature were evaluated, providing guidelines for curvature control toward the formation of three-dimensional microcoils.