Presentation Information
[10p-PB1-18]Characterization of Cu2O films deposited by DC sputtering using a copper-rich oxide target
〇(M1)Yutaro Murayama1, Akio Sekiguchi1, Kensho Hatakawa1, Shinsuke Miyajima1 (1.Science Tokyo)
Keywords:
Solar cell,Cu2O,DC sputtering
To fabricate high-quality Cu2O films for tandem solar cells, we investigated DC sputtering using a Cu-rich mixed target and subsequent annealing processes. By varying the ramp-up and annealing times, we found that longer times improved crystallinity and transmittance. However, excessive processing caused a sharp decrease in carrier diffusion length, likely due to CuO formation from over-oxidation. We will discuss the optimization of these annealing conditions.