Presentation Information

[10p-PB1-4]Effect of heat treatment on crystal phase of VO2 films by mist CVD using aqueous vanadium oxalate oxide solution

〇Asuka Ito1, Tahashi Masashi1, Goto Hideo1 (1.Chubu Univ.)

Keywords:

Vanadium Oxide,Mist Chemical Vapor Deposition