Presentation Information
[10p-S1-10]High-sensitivity BSI image sensor with ZrO AR film
〇Masayuki Nakamura1, Yoshiaki Nishi1, Toshifumi Yokoyama1, Masahiro Oda1, Nobuyoshi Takahashi1 (1.TPSCo)
Keywords:
image sensor,anti-reflection film
image sensor,anti-reflection film