[11a-B21-1~7] Atomic Layer Process (ALP) analysis and application technologies (4)

9:00 AM - 9:05 AM JST(12:00 AM - 12:05 AM UTC)

[11a-B21-1] Opening

〇Yukihiro Shimogaki^1,2 (1.The Univ. Tokyo, 2.Hokkaido Univ.)

Keywords:

Atomic Layer Deposition,Atomic Layer Etching,Atomic Layer Process

The opening remarks will outline the purpose of this symposium as a forum for discussing the growing importance of atomic layer processes and the process science that underpins them. They will also introduce the newly established JSAP Atomic Layer Process Research Group and its associated research group session.