[11a-B21-1~7] Atomic Layer Process (ALP) analysis and application technologies (4)

11:00 AM - 11:30 AM JST(2:00 AM - 2:30 AM UTC)English Presentation

[11a-B21-7] Transition metal carbide thin films prepared by atomic layer deposition: A new enabler for advanced metallization process

〇Soo-Hyun Kim¹ (1.Ulsan National Institute of Science and Technology)

Keywords:

ALP