Presentation Information

[11a-C309-1]Evaluation of Charging Characteristics in Epitaxially Grown Si/SiGe Nanodot/Si Structures

〇(D)Jongeun Baek1, Yuki Imai1, Yuji Yamamoto2,1, Katsunori Makihara1,2 (1.Nagoya Univ., 2.IHP-Leibniz Institut for innovative Mikroelektronik)

Keywords:

SiGe nanodot,Charging Characteristics