Presentation Information

[11a-C309-4]MBE Growth of SiGe/Si Multilayers on Si(110) Substrates and Evaluation of Critical Thickness

〇Keitaro Kato1, Tomohiro Hagiwara1, Kentarou Sawano1, Michihiro Yamada1, Yuichiro Mitani1 (1.Tokyo City Univ.)

Keywords:

Silicon Germanium,Silicon(110),Molecular Beam Epitaxy