[11a-E201-1~8] 13.3 Insulator technology

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[11a-E201-2] Two-step deposition and characterization of ultrathin GeO₂/Ge interfaces

〇Hiroki Inoue¹, Yoshitaka Iwasaki¹, Tomo Ueno¹, Mitaro Namiki¹ (1.Tokyo univ. of Agri & Tech)

Keywords:

semiconductor