Presentation Information

[11a-E308-8]Oxygen-assisted CVD growth of a-axis-oriented α-MoO3 thin films

〇Yui Ogawa1, Yoshiharu Krockenberger1, Michal Gregus1, Makoto Kawano1, Masaki Kobayashi1, Shengnan Wang1, Yoshitaka Taniyasu1 (1.NTT BRL)

Keywords:

MoO3,a-axis-oriented,Oxygen-assisted CVD growth