Presentation Information
[11a-PA6-14]Crystal Orientation and Microstructure of ScN/r-Sapphire Heterostructures
〇Takeshi Ohgaki1, Isao Sakaguchi1, Naoki Ohashi1 (1.NIMS)
Keywords:
scandium nitride,epitaxial growth,microstructure
scandium nitride,epitaxial growth,microstructure