Presentation Information
[11a-PA6-16]CVD growth of layered boron nitride using BCl3 generated from boron and chlorine gas
〇Ryouta Aoyama1, Kosuke Hiraoka1, Ruki Aoike1, Soma Ota1, Hayato Nakano1, Akira Takemura1, Yuko Kominami1, Kazuhiko Hara1,2,3 (1.GSIST, Shizuoka Univ., 2.CMMP, Shizuoka Univ., 3.RIE, Shizuoka Univ.)
Keywords:
boron nitride,thin film,CVD