[11a-PA6-1~23] 15.4 III-V-group nitride crystals

[11a-PA6-17] Evaluation of polymorphism of BN thin films grown by low-pressure CVD (2)

〇Kosuke Hiraoka¹, Ryota Aoyama¹, Akira Takemura¹, Hayato Nakano¹, Hiroko Kominami¹, Kohei Shima⁴, Shigefusa Chichibu⁴, Kazuhiko Hara^1,2,3 (1.GSIST, Shizuoka Univ., 2.CMMP, Shizuoka Univ., 3.RIE, Shizuoka Univ., 4.IMRAM, Tohoku Univ.)

Keywords:

boron nitride,CVD,thin film