Presentation Information
[11a-PA6-18]Raman Spectroscopy Analysis of Anisotropic Strain in Semipolar (11-22) AlN
〇Bei Ma1,2, Kensei Oya2, Ryota Akaike2, Yoshihiro Ishitani1, Hideto Miyake2 (1.Chiba Univ., 2.Mie Univ.)
Keywords:
strain,AlN,semi-polar
strain,AlN,semi-polar