Presentation Information
[11a-PA6-5]Polarity and Structural Control of GaN Thin Films Using a Sputtering GaN Target
〇Mirei Tokiwa1, Hidehiko Misaki1, Yoshihiro Ueoka1, Ken Matsumura2, Masami Mesuda1 (1.Tosoh Corp., 2.Tosoh Analysis and Research Center Co., Ltd.)
Keywords:
GaN,Sputtering,Crystal structure