Presentation Information
[11a-PB1-4]Characterization of ALD Al2O3/AlN interface
〇Yidi Wei1, Masanobu Hiroki2, Kazuyuki Hirama2, Yoshitaka Taniyasu2, Kazuhide Kumakura1, Masamichi Akazawa1 (1.RCIQE, Hokkaido Univ, 2.NTT-BRL)
Keywords:
AlN
Comment
To browse or post comments, you must log in.Log in