Presentation Information

[11a-PB1-4]Characterization of ALD Al2O3/AlN interface

〇Yidi Wei1, Masanobu Hiroki2, Kazuyuki Hirama2, Yoshitaka Taniyasu2, Kazuhide Kumakura1, Masamichi Akazawa1 (1.RCIQE, Hokkaido Univ, 2.NTT-BRL)

Keywords:

AlN