The 87th JSAP Autumn Meeting 2026
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Tue. Sep 8, 2026
Wed. Sep 9, 2026
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Fri. Sep 11, 2026
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[11a-PB1-4]
Characterization of ALD Al
2
O
3
/AlN interface
〇Yidi Wei
1
, Masanobu Hiroki
2
, Kazuyuki Hirama
2
, Yoshitaka Taniyasu
2
, Kazuhide Kumakura
1
, Masamichi Akazawa
1
(1.RCIQE, Hokkaido Univ, 2.NTT-BRL)
Keywords:
AlN
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