[11p-A13-1~9] 15.6 Group IV Compound Semiconductors (SiC)

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[11p-A13-6] Analysis of Local Thermal Diffusion Processes in 4H-SiC Using Laser Heterodyne Photothermal Displacement Method

〇Kouyou Harada¹, Masashi Kato², Atsuhiko Fukuyama¹ (1.Univ. of Miyazaki, 2.Nagoya Inst. of Tech.)

Keywords:

thermal diffusion,material characterization,SiC