[11p-A21-1~12] 13.7 Compound and power devices, process technology and characterization

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[11p-A21-4] Ti/Pt/Au ohmic electrodes for β-Ga₂O₃ semiconductor

〇Takayoshi Oshima¹, Yuichi Oshima¹ (1.NIMS)

Keywords:

Ga2O3,ohmic electrodes