Presentation Information

[11p-A21-8]Photo CV characterization of donor-compensating acceptor levels in β-Ga2O3 induced by oxygen annealing

〇Takumi Morita1, Masahiro Hara1, Ryota Yamada1, Takuma Kobayashi1, Heiji Watanabe1 (1.UOsaka)

Keywords:

Ga2O3,SBD,Net Donor Density