Presentation Information
[11p-A24-6]Process Window Exploration for Ultrafast Laser Scribing of REBCO HTS Tapes
Masaki Yumoto1, 〇Dai Yoshitomi1, Shinichi Kinugasa1, Yuka Yamamuro1, Hideyuki Takada1, Hidekazu Hara2, Yasuhisa Katayama2, Kiyoshige Hirose2, Aiko Narazaki1 (1.AIST, 2.Furukawa Electric)
Keywords:
ultrashort-pulse laser processing,high-temperature superconductivity,laser scribing
Multifilamentation is effective for reducing AC losses in REBa2Cu3O7-x(REBCO) high-temperature superconducting tapes, and thus a laser scribing technique that is fine, low-damage, and high-throughput is required. We investigated the process window using ultrashort-pulse laser processing, with pulse energy, pulse width, and scanning speed as the main parameters. The influence on the formation of a modified layer is also discussed.
