[11p-B21-1~9] Atomic Layer Process (ALP) analysis and application technologies (4)

4:30 PM - 4:35 PM JST(7:30 AM - 7:35 AM UTC)

[11p-B21-9] Closing

〇Takeshi Momose¹ (1.Kumamoto Univ.)

Keywords:

Atomic Layer Deposition,Atomic Layer Etching,Atomic Layer Process

The closing remarks will express our sincere appreciation for the active participation in the symposium and research group session on atomic layer processes. They will also announce that the next JSAP Autumn Meeting will be held at Kumamoto University next autumn, where an ALP session is also planned, before formally closing the symposium.