[11p-B21-1~9] Atomic Layer Process (ALP) analysis and application technologies (4) | The 87th JSAP Autumn Meeting 2026

Session Details

Symposium (Oral)Symposium : Atomic Layer Process (ALP) analysis and application technologies (4)

Fri. Sep 11, 2026 1:00 PM - 4:35 PM JST
Fri. Sep 11, 2026 4:00 AM - 7:35 AM UTC

B21 (Faculty of Engineering B Block)

1:00 PM - 1:30 PM JST(4:00 AM - 4:30 AM UTC)

〇Noriyuki Asami¹, Yukihisa Nakao¹, Yukihisa Wada¹, Mitsunari Sukekawa¹, Yuichiro Sasaki¹, Shintaro Arai¹ (1.Rapidus Corporation)

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

〇Hiroshi Ashihara¹ (1.KOKUSAI ELECTRIC)

2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

〇Yasutaka Matsuo¹, Xu Shi^1,3, Takashi Endo^1,3, Keisuke Nakamura³, Akihiro Nishida^1,2 (1.RIES, Hokkaido Univ., 2.ADEKA Corp., 3.I3, Hokkaido Univ.)

2:45 PM - 3:15 PM JST(5:45 AM - 6:15 AM UTC)

〇Kunihiro Kamataki¹, Sukma Fitriani², Kazuki Nagamine^1,2, Masaharu Shiratani¹ (1.Kyushu Univ. ISEE., 2.Kyushu Univ. IMI.)

3:15 PM - 3:45 PM JST(6:15 AM - 6:45 AM UTC)

〇Satoshi Maeda¹ (1.Hokkaido Univ.)

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

〇Noboru Sato¹, Tamaoki Naoki¹, Tsukune Atsuhiro¹, Shimogaki Yukihiro¹ (1.Tokyo Univ)

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

〇Taiki Kato¹, Hiroki Yamada¹, Kenichi Uki¹, Kosuke Yamamoto¹, Toshihiko Jo¹, Takeo Nakano¹ (1.Tokyo Electron)

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

〇Naoki Tamaoki¹, Sousa Nagai¹, Noboru Sato¹, Atsuhiro Tsukuno¹, Yukihiro Shimogaki¹ (1.Tokyo Univ.)

4:30 PM - 4:35 PM JST(7:30 AM - 7:35 AM UTC)

〇Takeshi Momose¹ (1.Kumamoto Univ.)