[11p-E201-1~15] CS.6 Code-sharing session of 6.1&13.3&13.5

1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[11p-E201-1] Non-heating Synthesis of (HfO₂)(ZrO₂) Thin Films by Digitally Processed DC Sputtering

〇Hideo Isshiki¹, Satoshi Fujiya¹, Itsuki Hino¹, Yudai Katsura¹, Kota Udagawa¹, Takahiro Tsukamoto¹ (1.Univ. of Electro-Comm.)

Keywords:

Ferroelectric materials,Sputter,HfZrO4(HZO)

Digitally processed DC Sputtering (DPDS) enables LBL deposition by alternating between ultrathin metal film deposition and surface oxidation on a metal target using high-precision controlled pulsed DC sputtering and synchronized reactive gas pulses. This report introduces the non-heating synthesis of ferroelectric (HfO2)(ZrO2) (HZO) thin films for non-volatile photophase shifters using DPDS.