[11p-E201-1~15] CS.6 Code-sharing session of 6.1&13.3&13.5

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[11p-E201-13] Internal electric field distribution in MFIM capacitors with ultra-thin HfO₂

〇Akira Toriumi¹, Shinji Migita² (1.None, 2.AIST)

Keywords:

ferroelectric HfO2 capacitor chracteristics

We would like to discuss the internal electric field in MFIM capacitor using insulator thicknesses and dielectric constants.