[11p-E201-1~15] CS.6 Code-sharing session of 6.1&13.3&13.5

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[11p-E201-15] Generation of anomalous PVs and their recovery in undoped HfO₂ MFM capacitors

〇Yukinori Morita¹, Shutaro Asanuma¹, Hiroyuki Ota¹, Shinji Migita¹ (1.AIST)

Keywords:

Ferroelectricity,HfO2,MFM capacitor