Presentation Information
[11p-E201-15]Generation of anomalous PVs and their recovery in undoped HfO2 MFM capacitors
〇Yukinori Morita1, Shutaro Asanuma1, Hiroyuki Ota1, Shinji Migita1 (1.AIST)
Keywords:
Ferroelectricity,HfO2,MFM capacitor
Ferroelectricity,HfO2,MFM capacitor