[11p-E206-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[11p-E206-6] Control of Ba/Si ratio in sputter-deposited BaSi₂ films on Al₂O₃(0001) Substrates via Elemental Composition Modulation

〇Mizuki Hirai¹, Md. Ariful Islam¹, Hikaru Takeshima², Yoichiro Koda², Masami Meshida², Kaoru Toko¹, Takashi Suemasu¹ (1.Univ. of Tsukuba, 2.Tosoh Corporation)

Keywords:

solar cell,BaSi2,stoichiometric ratio