[11p-N101-1~8] 15.4 III-V-group nitride crystals

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[11p-N101-1] Growth of AlN on μPSS by high-temperature MOVPE growth

〇(D)Yuto Matsubara¹, Koki Fujii¹, Yukiya Hayashi¹, Yuki Kuwahara¹, Soki Shimizu¹, Soichiro Iseki¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Kentaro Nagamatsu^1,2,3 (1.Faculty of Science and Engineering, Tokushima Univ., 2.pLED, Tokushima Univ, 3.IPHF, Tokushima Univ.)

Keywords:

PSS,MOVPE,AlN