Presentation Information
[11p-N102-8]Cathodoluminescence Study of the Correlation Between Local Surface Morphology and Luminescence Properties in High-Al-Content Single-Layer AlGaN
〇Koki Yoshikawa1, Zentaro Akase1, Kazunori Iwamitsu1, Ryota Akaike2, Hideto Miyake2, Shigetaka Tomiya1 (1.NAIST, 2.Mie Univ)
Keywords:
Al-rich AlGaN,local structural characterization,scanning electron microscope(SEM)
High-Al-content AlGaN with an Al composition of approximately 0.8 is required for far-UVC emission in the 230 nm wavelength range. In recent years, it has been reported that high external quantum efficiency can be achieved in this composition range by using a single-layer AlGaN emission layer. However, the correlation between local surface morphology and luminescence properties has not yet been fully clarified. In this study, SEM observation and CL measurements were performed on single-layer AlGaN samples with an Al composition of approximately 0.8 to evaluate the correlation between local surface morphology and luminescence properties.