[8a-A33-1~11] 17.1 Growth, Assembly, Structure control

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[8a-A33-8] X-ray CTR Scattering Analysis of the Monolayer MoS₂/Sapphire Interface Structure

〇Tetsuroh Shirasawa¹, Takahiro Nagata², Yoshiki Sakuma² (1.AIST, 2.NIMS)

Keywords:

MoS2,Interface structure,Synchrotron X-ray analysis

We report a non-destructive analysis of the atomic-scale structure of the monolayer MoS₂/sapphire interface using X-ray CTR scattering. We show the desorption of interfacial adsorbates, flattening of the MoS₂ monolayer, and formation of an S-terminated layer upon vacuum annealing, and discuss the interface structure responsible for high-quality vdW growth.