[8a-N102-1~11] 18.3 Measurement Informatics

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[8a-N102-5] Bayesian Spectroscopic Ellipsometry for Oxide Multilayer Analysis

Rogie Madula¹, 〇Kazunori Iwamitsu¹, Takanori Takahashi¹, Zentaro Akase¹, Yukiharu Uraoka¹, Shigetaka Tomiya¹ (1.NAIST)

Keywords:

Spectroscopic Ellipsometry,Bayesian Inference,Oxide Multilayer

Spectroscopic ellipsometry analysis of oxide multilayers is often challenged by the existence of multiple plausible solutions that can reproduce the same measured spectrum, making it difficult to assess the reliability of inferred structures and optical parameters. In this study, spectroscopic ellipsometry measurements and their Bayesian inference were applied to a TiO₂/SiO₂/Si multilayer structure to evaluate posterior distributions of film thickness and optical parameters. As a result, a buried SiO₂ interfacial layer was identified, and parameter correlations enabled assessment of uncertainties in the inferred results.