[8a-N102-1~11] 18.3 Measurement Informatics | The 87th JSAP Autumn Meeting 2026

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Oral presentation18 Informatics : 18.3 Measurement Informatics

[8a-N102-1~11]18.3 Measurement Informatics

Tue. Sep 8, 2026 9:00 AM - 12:00 PM JST
Tue. Sep 8, 2026 12:00 AM - 3:00 AM UTC

N102 (First Year Education Bld. N Block)

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[8a-N102-1]Real-Time Surface Temperature Distribution Measurement of Silicon Wafers Using Deep Learning-Assisted Optical Interferometric Contactless Thermometry (OICT)

〇Jiawen Yu¹, Harumu Ono¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[8a-N102-2]Practical estimation of a dual-sided reference flatness surface from single-sided wafer measurements

〇Masaki Takaishi¹, Yu Fujimura¹, Kevin Operiano¹, Susumu Maeda¹, Takao Sawada², Satoshi Kuwabara² (1.Aixtal, 2.Kohzu Precision)

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-N102-3]Deep Learning Analysis of Semiconductor Optical Properties: Potential Comparison between Spectroscopic Ellipsometry and Reflectance-Transmittance Measurements

〇Naoki Kurokawa¹, Akihiro Baba¹, Jiro Nishinaga², Shogo Ishizuka², Takashi Koida², James Hilfiker³, Hiroyuki Fujiwara¹ (1.Gifu Univ., 2.AIST, 3.J.A. Woollam Co., Inc.)

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-N102-4]Transfer Learning for Deep Learning Ellipsometry: Rapid Automated Analysis of
Optical Constants and Thin-Film Structures on Different Substrate Materials

〇Yuki Ikarashi¹, Yuki Yamamoto¹, Ren Iwayama¹, Naoki Kurokawa¹, Akihiro Baba¹, Jiro Nishinaga², Shogo Ishizuka², James Hilfiker³, Hiroyuki Fujiwara¹ (1.Gifu Univ., 2.AIST, 3.J.A. Woollam Co., Inc.)

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[8a-N102-5]Bayesian Spectroscopic Ellipsometry for Oxide Multilayer Analysis

Rogie Madula¹, 〇Kazunori Iwamitsu¹, Takanori Takahashi¹, Zentaro Akase¹, Yukiharu Uraoka¹, Shigetaka Tomiya¹ (1.NAIST)

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[8a-N102-6]Automated Analysis in Spectroscopic Ellipsometry Using Large Language Model

〇Hitoshi Nakatani¹ (1.HORIBA, Ltd.)

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[8a-N102-7]Application of the XAS system using a high-brightness X-ray source

〇Tomomi Ogaki¹ (1.Canon MJ)

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-N102-8]Molecular Structure Prediction from XAFS Spectra Using Machine Learning and Model Adaptation with Experimental Data

〇(D)Yu Fujikata^1,2, Teruyasu Mizoguchi¹ (1.Sch. of Eng., UTokyo, 2.Mitsubishi Chemical Corporation)

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[8a-N102-9]Prototype-based Phase Identification from Powder X-ray Diffraction Measurement Data

〇Yusei Ito^1,2, Yuki Nishihori^1,2, Kanta Ono^1,2 (1.Osaka Univ., 2.OTRI)

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)English Presentation

[8a-N102-10]Geometric Stability as a Reliability Criterion for AI-Assisted Spectroscopic Inference: From Mössbauer Spectroscopy to Geometric Identifiability Theory

〇Sonia Sharmin¹, Chiharu Mitsumata¹, Eiji Kita¹, Hideto Yanagihara¹ (1.Appl. Phys., Sci. & Eng., Univ. Tsukuba)

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[8a-N102-11]Feature extraction from volcanic gas monitoring data Using semiconductor gas sensors by principal component analysis

〇Komei Yamada¹, Takeshi Hashishin², Kazuhiro Kobayashi³ (1.GSST, Kumamoto Univ., 2.FAST, Kumamoto Univ., 3.Kumamoto Prefectural College of Technology)

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