Presentation Information
[8a-PA3-2]Energy Spread Evaluation of a Thermionic Electron Gun for SEM-EELS
〇Yuto Tajiri1, Sotatsu Yanagimoto1, Takumi Sannomiya1 (1.Science Tokyo)
Keywords:
scanning electron microscope,energy spread,electron energy loss spectroscopy
Electron energy loss spectroscopy (EELS) is commonly implemented in TEM or STEM. However, SEM-based EELS has also been conducted, taking advantage of high interaction with samples through the use of low accelerating voltages. In this study, energy spectra were measured under applied voltage conditions. To evaluate the dependence of energy width on electron beam current, measurements of energy spread were performed by independently varying the filament current of the LaB6 emitter and the magnetic lens strength at a stage below the filament.