[8p-A21-1~18] 6.4 Thin films and New materials

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8p-A21-10] Fabrication of free-standing cerium fluoride membrane using a water-soluble sacrificial layer and topochemical reaction

〇Akiko Kamigaito¹, Ayuka Nakano¹, Makoto Minohara², Akira Chikamatsu¹ (1.Ochanomizu Univ., 2.AIST)

Keywords:

free-standing fluoride membrane,sacrificial layer thin film synthesis

Exfoliation techniques of oxide membranes using water-soluble sacrificial layers have attracted attention as a method for fabricating free-standing membranes without substrate-induced strain. However, these techniques have not yet been applied to fluoride-based materials, which are expected to be used in next-generation devices. In this study, we attempted to fabricate free-standing cerium fluoride membranes by combining the exfoliation of cerium oxide films with a topochemical fluorination reaction using a sacrificial layer. After transferring the film to a polymer sheet, we carried out the reaction under an Ar atmosphere. Analysis of the changes in diffraction peaks confirmed the formation of free-standing cerium fluoride films.