Presentation Information

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8p-A21-16]Synthesis of oriented thin films of metal organic framework by Mist CVD

〇(M1)Yuta Konemura¹, Daichi Oka¹, Ibuki Shoda¹, Yuki Inoue¹, Yasushi Hirose¹ (1.Tokyo Metropolitan Univ.)

Keywords:

Chemical Vapor Deposition,Metal Organic Framework,Thin film

Metal-organic frameworks are expected to find applications in high-sensitivity gas sensors and other devices through layering with functional oxides. HKUST-1 is one of the representative MOFs, and the synthesis of oriented thin films using the layer-by-layer (LBL) method and physical vapor deposition (PVD) has been reported. In this study, we attempted to synthesize oriented HKUST-1 thin films on oxide substrates using mist chemical vapor deposition (CVD), an atmospheric-pressure process capable of rapid film formation compared to the LBL method.

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