Presentation Information
[8p-B11-9]Analysis of Dry Etching Characteristics of Polyimide for Redistibution Layer
〇Ryoga Hosoda1, Yoichiro Kurita2, Kenichi Inoue1, Takayoshi Tsutsumi1, Kenji Ishikawa1 (1.Nagoya Univ., 2.Science Tokyo)
Keywords:
Chipset,Polyimide,Redistribution Layer
