Presentation Information

[8p-B11-9]Analysis of Dry Etching Characteristics of Polyimide for Redistibution Layer

〇Ryoga Hosoda1, Yoichiro Kurita2, Kenichi Inoue1, Takayoshi Tsutsumi1, Kenji Ishikawa1 (1.Nagoya Univ., 2.Science Tokyo)

Keywords:

Chipset,Polyimide,Redistribution Layer