[8p-E206-1~17] 7.1 X-ray technologies

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[8p-E206-1] Laminar-type W/B₄C graded refractive index multilayer grating exhibiting high diffraction efficiency and high spectral flux in the 300–1100 eV region

〇Masato Koike^1,2,3, Tadashi Hatano^2,4, Alexander Pirozhkov¹, Takanori Murano^3,5, Shogo Koshiya⁵, Masami Terauchi⁶ (1.KPSI, QST, 2.IMRAM, Tohoku Univ., 3.Dept. of Eng., OMU, 4.SRIS, Tohoku Univ., 5.SABU, JEOL, 6.TCMC, Tohoku Univ.)

Keywords:

diffraction grating,soft X-ray,multilayer

To improve the analytical sensitivity (spectral flux) of a soft X-ray flat field emission diffraction grating spectrometer in the 300–1100 eV range, a new multilayer diffraction grating was designed, fabricated, and evaluated. To increase the amount of light flux reaching the diffraction grating from the light source, the incident angle was set smaller than conventional design, and the groove density was increased to improve resolution while maintaining dispersion. Furthermore, the diffraction efficiency was improved by optimizing the groove shape and adding a gradient refractive index (GRI) type W/B₄C multilayer.