Presentation Information

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[8p-E206-11]Exploring optimal conditions toward shorter-wavelength driver lasers for EUV sources

〇Nozomi Tanaka^1,2, Yu Yamamoto¹, Akira Sasaki^1,3, Katsunobu Nishihara^1,4, Yuji Takagi¹, Atsushi Sunahara^1,5, Tomoyuki Johzaki^1,6, Kentaro Tomita⁷, Shinsuke Fujioka¹, Masashi Yoshimura¹ (1.ILE, U. Osaka, 2.NIFS, 3.QST, 4.OMU, 5.Purdue University, 6.Hiroshima University, 7.Hokkaido University)

Keywords:

EUV source,Tin plasma

Mid-infrared solid-state lasers are expected as alternatives to CO2 lasers for driving EUV sources. Using the radiation-hydrodynamics code STAR-1D, we performed a parameter survey of over 140,000 combinations, including wavelength (1–11 µm), intensity, pulse width, and target size, to explore the optimal conditions for EUV conversion efficiency and EUV output. The conversion efficiency reached a maximum of 5.63% at 5.5 µm and 4.64% at 2 µm. We revealed that the optimal conditions vary systematically with wavelength so as to maintain an optical depth near unity. We also proposed several practical operating conditions for the 2 µm laser, a promising alternative driver candidate.

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