Presentation Information

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8p-E206-5]Imaging Performance Evaluation of an EUV Microscope Objective Mirror via High-Precision Wavefront Control

〇(P)Shun Uji¹, Yuta Fujisawa¹, Takao Tanabe¹, S. Maidul Haque¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

Keywords:

Extreme Ultraviolet,EUV Microscopy,Point diffraction interferometer

Wavefront aberrations of a high-magnification objective mirror for a 13.5-nm-wavelength EUV microscope were corrected using a point diffraction interferometer (PDI). Correction of coma, spherical aberration, and astigmatism reduced the total wavefront error to 0.87 nm rms, satisfying the Maréchal criterion. The corrected mirror was implemented in the microscope, resulting in a substantial improvement in image contrast and successful observation of porous structures with feature sizes of approximately 30–50 nm.

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