[8p-E206-1~17] 7.1 X-ray technologies

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[8p-E206-7] Comparative Collective Thomson Scattering Study of Single- and Dual-Trigger Laser-Assisted Discharge Tin Plasmas for EUV Sources

〇Hideyuki Sera^1,2, Akihisa Nagano¹, Kentaro Tomita² (1.Ushio inc., 2.Hokkaido univ.)

Keywords:

EUV lightsource,Collective Thomson scattering mesurement,Pinch plasma

Single- and dual-trigger configurations of a laser-assisted discharge plasma (LDP) EUV source were compared using collective Thomson scattering. In the dual-trigger configuration, the plasma reached Te = 23 eV and ne = 1 × 10^25 m^-3 at the EUV peak, indicating higher temperature and density than in the single-trigger configuration. In addition, changes in the pre-discharge electron density distribution and a reduction in the pinch contraction speed were observed. These results suggest that the second trigger laser modifies the temporal evolution of the Z-pinch.