[8p-E301-1~22] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

6:00 PM - 6:15 PM JST(9:00 AM - 9:15 AM UTC)

[8p-E301-21] First-Principles and Thermodynamic Studies of (Al_xGa_1-x)₂O₃ Growth by MBE

〇Rie Togashi¹, Yuma Terauchi², Akira Kusaba³, Masataka Higashiwaki⁴, Yoshinao Kumagai² (1.Sophia Univ., 2.Tokyo Univ. of Agric. and Tech., 3.RIAM, Kyushu Univ., 4.Osaka Metropolitan Univ.)

Keywords:

gallium oxide,first-principles calculation,thermodynamic analysis