Presentation Information
[8p-E301-8]Halide vapor phase epitaxy of c-plane α-Ga2O3 on an α-(Cr0.8Fe0.2)2O3 template
〇Yuichi Oshima1, Takayoshi Oshima1, Shiyu Xiao2, Kazuto Murakami2, Katsuhiro Imai2, Takahiro Tomita2 (1.NIMS, 2.NGK)
Keywords:
Ga2O3,Cr2O3,HVPE
