[8p-N101-1~14] 15.4 III-V-group nitride crystals

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8p-N101-1] Evaluation of crystal orientation of room-temperature in-situ sputtered Ti on pulsed-sputtered n-type AlGaN

〇(DC)Aiko Naito¹, Hiroshi Fujioka¹ (1.IIS, Utokyo)

Keywords:

ohmic contact,orientation,in-situ