Presentation Information

[8p-N101-10]Fabrication of Hexagonal ε-NbN Thin Films on GaN by Sputtering

〇Takeru Kodama1, Yuki Kato1, Koryo Masuzawa1, Takayuki Harada1,2, Kazuhisa Ikeda1, Atsushi Kobayashi1 (1.Tokyo Univ. of Science, 2.NIMS)

Keywords:

superconductor,NbN