Presentation Information

[8p-N101-12]Investigation of Initial Growth Layers in GaN-on-Si Epitaxy Using an Amorphous-Like Interlayer

〇Daigo Yokoi1, Fumio Kawamura2, Naoomi Yamada1 (1.Chubu Univ., 2.NIMS)

Keywords:

GaN-on-SI,sputtering,vertical device