[8p-N101-1~14] 15.4 III-V-group nitride crystals

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[8p-N101-13] Insitu X-ray diffraction measurement of nanochannel epitaxy and remote epitaxy of GaN

〇Shigeya Naritsuka¹, Takahiro Maruyama¹, Takuo Sasaki², Kenji Ohwada², Norihiro Oshime², James Harries² (1.Meijo Univ., 2.QST.)

Keywords:

nanochannel epitaxy,insitu X-ray diffraction measurement,remote epitaxy