Presentation Information
[8p-N101-14]Crack-free InAlN thermoelectric thin films with larger thickness
〇Yuma Sakai1, Tsutomu Araki2, Momoko Deura1,3 (1.Waseda Univ., 2.Ritsumeikan Univ., 3.R-GIRO)
Keywords:
InAlN,thermoelectric thin film,RF-MBE
InAlN,thermoelectric thin film,RF-MBE