Presentation Information

[8p-N101-14]Crack-free InAlN thermoelectric thin films with larger thickness

〇Yuma Sakai1, Tsutomu Araki2, Momoko Deura1,3 (1.Waseda Univ., 2.Ritsumeikan Univ., 3.R-GIRO)

Keywords:

InAlN,thermoelectric thin film,RF-MBE